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MKS Instruments

Used MKS/ENI RF Generator

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MKS Instruments

Used MKS/ENI RF Generator

Name: Used MKS/ENI RF Generator
Brand: MKS Instruments
Price: 6805 USD
Availability: InStock

Market Price

↑ Rising

$4K–$10K

Typical secondary market pricing · USD

Low $3,520Avg $6,805High $10,090

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $4K – $10K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market DataMKS ENI RF Generator

Trending Up

Price Range

$4K — $10K

Based on verified secondary market transactions

Last Sold

$6,800

Apr 29, 2026

Refurbished

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How much does a used Used MKS/ENI RF Generator cost in 2026?

A used Used MKS/ENI RF Generator from MKS Instruments typically sells for $4k – $10k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS/ENI RF Generator from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Cost in 2026?

Used MKS/ENI RF generators in 2026 range from $3,520–$10,090, depending on condition and service history. Units in used condition (Grade B) typically fall between $4,200–$6,800, while refurbished units (with full diagnostics and warranty) command $7,500–$10,090. This represents 50–70% savings versus new OEM list prices, which hover around $12,000–$18,000. Units with >40,000 RF-hours are preferred, as lower-hour units may indicate underutilization or potential wear. Prices are trending upward in 2026 due to increased demand from semiconductor foundries and tighter supply chains. Verify the part number and service records before finalizing, as 2026 market volatility affects pricing unpredictably.

Specifications and Compatible Tools

Key specs include 13.56MHz frequency, 1–10 kW power output, ±1% voltage stability, and IP54 enclosure rating. These generators are critical for plasma etching and deposition tools in 2026. Compatible models include:

ENI 3000 series (2018–2022)
MKS 13.56MHz RF power modules (2015–2020)
Applied Materials Plasmalab 500 (2019–2023)
Avoid units with part number ENI-3000-001, which are incompatible with newer tool firmware. Always confirm the exact model and revision to ensure compatibility.

What to Check Before Buying a Used in 2026

Verify RF output power using a power meter (tolerance: ±1% of rated value).
Test insulation resistance with a megohmmeter (minimum 100 MΩ at 1,000V).
Inspect cooling system for leaks or degraded coolant (2026 standard: 30% higher efficiency than 2020 models).
Check RF-hour meter—units with <20,000 hours may lack long-term reliability.
Validate service logs for 2023–2025 maintenance records, as 2026 buyers prioritize recent upkeep.

FAQ

Q: How does the ENI RF generator compare to the MKS 13.56MHz model?
A: The ENI RF generator is a rebranded MKS unit, offering identical performance but with ENI-specific firmware. Both are compatible with 2026-era tools, but ENI units often have lower availability in 2026.

Q: Is this better than the OEM unit?
A: Used ENI/MKS units are not better than OEM, but they are cheaper (50–70% less) and suitable for 2026 applications with proper verification.

Q: Can I use this with a 2023 Applied Materials tool?
A: Yes, if the part number matches the tool’s requirements. Always cross-reference with the 2026-compatible list.

Q: What’s the lead time for sourcing this unit?
A: 2–4 weeks after sourcing, as 2026 inventory is tightly controlled.