Used MKS GE50A Mass Flow Controller

Name: Used MKS GE50A Mass Flow Controller
Brand: MKS Instruments
Price: 1976 USD
Availability: InStock

Market Price

→ Stable

$632–$3K

Typical secondary market pricing · USD

Low $632Avg $1,976High $3,320

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $632 – $3K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used MKS GE50A Mass Flow Controller cost in 2026?

A used Used MKS GE50A Mass Flow Controller from MKS Instruments typically sells for $632 – $3k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS GE50A Mass Flow Controller from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used MKS GE50A Mass Flow Controller Cost in 2026?

Used units range from $632 to $2,150 in 2026, with refurbished models priced $1,200–$3,320. Refurbished variants include recalibration and sensor replacement, saving 53–93% vs. new (est. $5,000–$6,500). Used parts without service history may require additional testing, adding $200–$400 to total cost. Caveat: Units with >10,000 operating hours (common in 2018–2020 deployments) often fail flow accuracy tests, reducing effective savings by 15–30%.

MKS GE50A Specifications and Compatible Tools

Key specs: 0–50 sccm flow range, ±1% accuracy, 12–24V DC power, 4–20 mA output, and 1 kHz response frequency. Compatible with:

Lam Research Centura Cluster Tool (2015–2019)
Applied Materials Endura P5000 (2017–2021)
Tokyo Electron Lambda Flex (2016–2020)
Warning: Not compatible with MKS 11802A controllers (2008–2014) due to conflicting pressure compensation algorithms. Verify PID loop settings before installation.

What to Check Before Buying a Used MKS GE50A in 2026

Calibration date: Reject units calibrated >5 years prior (NIST traceability expires).
Voltage drop test: Use a multimeter to measure supply voltage under load; >2.5V deviation indicates failing regulators.
Flow bench verification: Compare actual vs. reported flow at 25% and 75% setpoints; >2% deviation requires sensor replacement.
O-ring condition: Inspect for cracks or hardening (common in parts >8 years old).
Firmware version: GE50A rev 2.1 (2019+) supports modern 4–20 mA noise filtering; older revs may require signal conditioning.