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MKS Instruments

Used MKS GE50A Mass Flow Controller

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MKS Instruments

Used MKS GE50A Mass Flow Controller

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✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used MKS GE50A Mass Flow Controller moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

How much does a used Used MKS GE50A Mass Flow Controller cost in 2026?

Pricing for used Used MKS GE50A Mass Flow Controller units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS GE50A Mass Flow Controller from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

MKS GE50A Specifications and Compatible Tools

Key specs: 0–50 sccm flow range, ±1% accuracy, 12–24V DC power, 4–20 mA output, and 1 kHz response frequency. Compatible with:

  • Lam Research Centura Cluster Tool (2015–2019)
  • Applied Materials Endura P5000 (2017–2021)
  • Tokyo Electron Lambda Flex (2016–2020)
    Warning: Not compatible with MKS 11802A controllers (2008–2014) due to conflicting pressure compensation algorithms. Verify PID loop settings before installation.

What to Check Before Buying a Used MKS GE50A in 2026

  1. Calibration date: Reject units calibrated >5 years prior (NIST traceability expires).
  2. Voltage drop test: Use a multimeter to measure supply voltage under load; >2.5V deviation indicates failing regulators.
  3. Flow bench verification: Compare actual vs. reported flow at 25% and 75% setpoints; >2% deviation requires sensor replacement.
  4. O-ring condition: Inspect for cracks or hardening (common in parts >8 years old).
  5. Firmware version: GE50A rev 2.1 (2019+) supports modern 4–20 mA noise filtering; older revs may require signal conditioning.

FAQ

Q: Is the GE50A interchangeable with the MKS 11796A?
A: No. The 11796A has a 0–100 sccm range and lacks the GE50A’s high-precision PID control.

Q: What’s the MTBF for a used GE50A?
A: 85,000–120,000 hours (2018–2020 models). Units with >60,000 hours need

Recent Market Listings

Updated Sep 30

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Related Parts

Quick Info

ConditionUsed
CategorySubassemblies

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