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MKS Instruments

Used MKS Mass Flow Controller (MFC)

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MKS Instruments

Used MKS Mass Flow Controller (MFC)

Market Price

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Available by Request

Last verified: 2026-05-11

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✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used MKS Mass Flow Controller (MFC) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

How much does a used Used MKS Mass Flow Controller (MFC) cost in 2026?

Pricing for used Used MKS Mass Flow Controller (MFC) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS Mass Flow Controller (MFC) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

MKS Mass Flow Controller (MFC) Specifications and Compatible Tools

Key specs: 0–1,000 sccm flow range, ±1% accuracy, 200ms response time, 12–36V DC, 50–60Hz. Compatible with:

  • Applied Materials Centura (1998–2005, model 5500)
  • Lam Research Endace 5500 (2001–2007, model 8855)
  • ASMI Fusion F12 (2003–2010, model 1200-F12)
    Warning: Do not install on Lam 250ix (part 987-4567) without a pressure adapter; native 100psia MFCs cannot handle 250psia process lines.

What to Check Before Buying a Used MKS MFC in 2026

  1. Calibration cycle count: Use a multimeter to read internal EEPROM (address 0x5A). Reject if >

Recent Market Listings

Updated Sep 30

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Related Parts

Quick Info

ConditionUsed
CategorySubassemblies

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