MKS Instruments
Used MKS Mass Flow Controller (MFC)
MKS Instruments
Used MKS Mass Flow Controller (MFC)
Market Price
↓ Falling$632–$3K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Price Range
$632 — $3K
Based on verified secondary market transactions
Last Sold
$1,450
May 9, 2026
RefurbishedHow much does a used Used MKS Mass Flow Controller (MFC) cost in 2026?
A used Used MKS Mass Flow Controller (MFC) from MKS Instruments typically sells for $632 – $3k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used MKS Mass Flow Controller (MFC) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used MKS Mass Flow Controller (MFC) Cost in 2026?
In 2026, used MKS MFCs (models 244A, 247A, 249A) will range from $632–$1,950 for working units with <5,000 calibration cycles, and $1,370–$3,320 for refurbished variants with factory-certified accuracy. Refurbished units save 40–70% vs new (MSRP ~$5,000–$8,500). Caveat: Units with >10,000 total calibration cycles (trackable via internal counter) show >2% drift in ±1% accuracy specs, rendering them unsuitable for 5nm node tools.
MKS Mass Flow Controller (MFC) Specifications and Compatible Tools
Key specs: 0–1,000 sccm flow range, ±1% accuracy, 200ms response time, 12–36V DC, 50–60Hz. Compatible with:
- Applied Materials Centura (1998–2005, model 5500)
- Lam Research Endace 5500 (2001–2007, model 8855)
- ASMI Fusion F12 (2003–2010, model 1200-F12)
Warning: Do not install on Lam 250ix (part 987-4567) without a pressure adapter; native 100psia MFCs cannot handle 250psia process lines.
What to Check Before Buying a Used MKS MFC in 2026
- Calibration cycle count: Use a multimeter to read internal EEPROM (address 0x5A). Reject if >
Recent Market Listings
Updated May 19$1,450
Refurbished$420
As-is$2,900
Certified$950
Refurbished$3,600
Certified| Type | Price | Condition | Date |
|---|---|---|---|
| Last Sale | $1,450 | Refurbished | May 9, 2026 |
| Last Sale | $420 | As-is | Apr 28, 2026 |
| Last Sale | $2,900 | Certified | Apr 5, 2026 |
| Last Sale | $950 | Refurbished | Mar 14, 2026 |
| Last Sale | $3,600 | Certified | Feb 8, 2026 |
Place a bid · Prices update daily
Recent Sales
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Quick Info
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Market: $632 – $3K
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