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MKS Instruments

Used MKS Throttle Valve / Butterfly Valve

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MKS Instruments

Used MKS Throttle Valve / Butterfly Valve

Name: Used MKS Throttle Valve / Butterfly Valve
Brand: MKS Instruments
Price: 3165 USD
Availability: InStock

Market Price

↑ Rising

$1K–$5K

Typical secondary market pricing · USD

Low $1,430Avg $3,165High $4,900

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $1K – $5K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market DataMKS Throttle Valve

Trending Up

Price Range

$1K — $5K

Based on verified secondary market transactions

Last Sold

$2,800

May 3, 2026

Refurbished

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How much does a used Used MKS Throttle Valve / Butterfly Valve cost in 2026?

A used Used MKS Throttle Valve / Butterfly Valve from MKS Instruments typically sells for $1k – $5k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS Throttle Valve / Butterfly Valve from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used MKS Throttle Valve / Butterfly Valve Cost in 2026?

Used units range from $1,430 to $3,200, while refurbished models (with seal and actuator upgrades) cost $3,800–$4,900. New OEM valves exceed $12,000, offering 65–75% savings over original pricing. Caveat: Valves with >10 years of service life (post-2016 manufacture) see a 20–30% price drop unless recertified for high-purity applications.

MKS Throttle Valve / Butterfly Valve Specifications and Compatible Tools

Key specs: 1.5" orifice diameter, 10⁻⁶ Torr leak rate, 24V DC actuation, 0.5–10 Torr operating range. Compatible with:

Applied Materials Centura 5500 (2008–2015)
Lam Research 2300 Exelan (2010–2017)
ASMI Fusion D14 (2012–2019)
Incompatible with: Varian 300 Series (part # 940-001234) due to divergent stem threading (ISO 225 vs 1122). Verify port orientation before installation.

What to Check Before Buying a Used MKS Throttle Valve / Butterfly Valve in 2026

Disc wear: Measure butterfly blade thickness with a micrometer; <0.8mm indicates excessive erosion (new: 1.2mm).
Seal integrity: Perform helium mass spectrometer leak test; >5×10⁻⁷ Torr·L/s fails.
Actuator response: Use an oscilloscope to verify 24V DC signal triggers full stroke in <150ms.
Corrosion: Reject units with pitting >50µm on stainless-steel components (use a profilometer).
Cycle count: Valves with >500,000 actuations require bearing replacement; check service logs or derate by