Used MKS Throttle Valve / Butterfly Valve

Name: Used MKS Throttle Valve / Butterfly Valve
Brand: MKS Instruments

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used MKS Throttle Valve / Butterfly Valve moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used MKS Throttle Valve / Butterfly Valve cost in 2026?

Pricing for used Used MKS Throttle Valve / Butterfly Valve units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used MKS Instruments Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MKS Throttle Valve / Butterfly Valve from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

MKS Throttle Valve / Butterfly Valve Specifications and Compatible Tools

Key specs: 1.5" orifice diameter, 10⁻⁶ Torr leak rate, 24V DC actuation, 0.5–10 Torr operating range. Compatible with:

Applied Materials Centura 5500 (2008–2015)
Lam Research 2300 Exelan (2010–2017)
ASMI Fusion D14 (2012–2019)
Incompatible with: Varian 300 Series (part # 940-001234) due to divergent stem threading (ISO 225 vs 1122). Verify port orientation before installation.

What to Check Before Buying a Used MKS Throttle Valve / Butterfly Valve in 2026

Disc wear: Measure butterfly blade thickness with a micrometer; <0.8mm indicates excessive erosion (new: 1.2mm).
Seal integrity: Perform helium mass spectrometer leak test; >5×10⁻⁷ Torr·L/s fails.
Actuator response: Use an oscilloscope to verify 24V DC signal triggers full stroke in <150ms.
Corrosion: Reject units with pitting >50µm on stainless-steel components (use a profilometer).
Cycle count: Valves with >500,000 actuations require bearing replacement; check service logs or derate by