Used Scroll Vacuum Pump for Semiconductor

Name: Used Scroll Vacuum Pump for Semiconductor
Brand: Various (Edwards, Agilent)

Market Price

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Available by Request

Last verified: 2026-05-11

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Scroll Vacuum Pump for Semiconductor moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Scroll Vacuum Pump for Semiconductor cost in 2026?

Pricing for used Used Scroll Vacuum Pump for Semiconductor units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (Edwards, Agilent) Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Scroll Vacuum Pump for Semiconductor from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Scroll Vacuum Pump Specifications and Compatible Tools

Key specs: 1.5–5 HP motor, 10–50 m³/hr flow rate, 208–480V AC, 50/60Hz. Base pressure: 10⁻³ Torr. Compatible with:

Edwards E2M-50 (2005–2012 production)
Agilent 5890 Series II (1998–2003 production)
Lam Research Centura etch tools (port adapter required)
Warning: Not compatible with Pfeiffer Vacuum NEX series (part # NVS-3000) due to mismatched ISO 609 flange interfaces. Confirm tool’s vacuum port size (DN40/DN63) before purchase.

What to Check Before Buying a Used Scroll Vacuum Pump in 2026

Scroll profile wear: Measure scroll lobe clearance with a micrometer. Reject if >0.005" (new is 0.002–0.003").
Vacuum integrity: Test with a calibrated Pirani gauge. Must reach <10⁻³ Torr in 15 minutes; >10⁻² Torr indicates seal degradation.
Motor insulation resistance: Use a megohmmeter. Values <10MΩ at 500V DC signal insulation failure.
Lubricant condition: Analyze oil via refractometer. ISO 3448 Grade 46 oil with >15% contamination by TDI (total dissolved impurities) is non-repairable.
Service lifecycle: Reject pumps with >8,000 cumulative operating hours without rebuild—bearing wear exceeds 20% tolerance.

FAQ

Q: Is a used scroll pump as reliable as new for semiconductor tools?
A: Yes, if it has <5 years since overhaul and passes 10⁻³ Torr stability tests. New pumps offer 3–5