Used Scroll Vacuum Pump for Semiconductor

Name: Used Scroll Vacuum Pump for Semiconductor
Brand: Various (Edwards, Agilent)
Price: 2250 USD
Availability: InStock

Market Price

→ Stable

$500–$4K

Typical secondary market pricing · USD

Low $500Avg $2,250High $4,000

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $500 – $4K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used Scroll Vacuum Pump for Semiconductor cost in 2026?

A used Used Scroll Vacuum Pump for Semiconductor from Various (Edwards, Agilent) typically sells for $500 – $4k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (Edwards, Agilent) Vacuum Systems vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Scroll Vacuum Pump for Semiconductor from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Scroll Vacuum Pump Cost in 2026?

In 2026, used scroll vacuum pumps (Edwards E2M-50, Agilent 5890 Series II) will range from $1,200 to $3,500, depending on age and maintenance history. Refurbished units with <5 years since last overhaul will cost $2,000–$4,000, saving 40–60% compared to new ($5,000–$7,000 MSRP). Units with >10 years of operational age typically show a 25% efficiency drop, reducing their value by $800–$1,200. Always verify the pump’s last PM date—pumps without SEMI E49.1-compliant servicing in the past 3 years may fail pressure stability tests.

Scroll Vacuum Pump Specifications and Compatible Tools

Key specs: 1.5–5 HP motor, 10–50 m³/hr flow rate, 208–480V AC, 50/60Hz. Base pressure: 10⁻³ Torr. Compatible with:

Edwards E2M-50 (2005–2012 production)
Agilent 5890 Series II (1998–2003 production)
Lam Research Centura etch tools (port adapter required)
Warning: Not compatible with Pfeiffer Vacuum NEX series (part # NVS-3000) due to mismatched ISO 609 flange interfaces. Confirm tool’s vacuum port size (DN40/DN63) before purchase.

What to Check Before Buying a Used Scroll Vacuum Pump in 2026

Scroll profile wear: Measure scroll lobe clearance with a micrometer. Reject if >0.005" (new is 0.002–0.003").
Vacuum integrity: Test with a calibrated Pirani gauge. Must reach <10⁻³ Torr in 15 minutes; >10⁻² Torr indicates seal degradation.
Motor insulation resistance: Use a megohmmeter. Values <10MΩ at 500V DC signal insulation failure.
Lubricant condition: Analyze oil via refractometer. ISO 3448 Grade 46 oil with >15% contamination by TDI (total dissolved impurities) is non-repairable.
Service lifecycle: Reject pumps with >8,000 cumulative operating hours without rebuild—bearing wear exceeds 20% tolerance.

FAQ

Q: Is a used scroll pump as reliable as new for semiconductor tools?
A: Yes, if it has <5 years since overhaul and passes 10⁻³ Torr stability tests. New pumps offer 3–5