Used Upper Electrode for Semiconductor Etch Chamber

Name: Used Upper Electrode for Semiconductor Etch Chamber
Brand: Various (AMAT, Lam, TEL)
Price: 1210 USD
Availability: InStock

Market Price

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2 active listings

From $1K

Typical secondary market pricing · USD

Low $1,210Avg $1,210High $1,210

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $1K – $1K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Upper Electrode for Semiconductor Etch Chamber cost in 2026?

A used Used Upper Electrode for Semiconductor Etch Chamber from Various (AMAT, Lam, TEL) typically sells for $1k – $1k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (AMAT, Lam, TEL) Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Upper Electrode for Semiconductor Etch Chamber from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Upper Electrode for Semiconductor Etch Chamber Cost in 2026?

Used units (tested, <10k plasma cycles) range from $2,400 to $5,800 in 2026, depending on OEM and surface condition. Refurbished options (reprofiled, <5k cycles) start at $1,200–$3,200. Savings vs new (2026 MSRP: $8,500–$14,000) average 40–70%. Caveat: Electrodes with pitting >50 microns or >15k cycles add $1,000–$2,500 to base price due to rework costs.

Upper Electrode Specifications and Compatible Tools

Key specs: 13.56 MHz RF frequency, 2.0 kW power handling, 200–400 VDC bias, 316L stainless steel body with alumina insulation. Compatible with:

AMAT Centura 5500 (1998–2005)
Lam P5i (2001–2009)
TEL FAS-3000 (2003–2012)
Exclusion: Not compatible with AMAT Reflexion Etch systems (Part #AE-UE-200X due to RF coupling geometry). Verify tool’s RF matching network before installation.

What to Check Before Buying a Used Upper Electrode in 2026

Surface pitting: Use a profilometer; reject if depth exceeds 50 microns or coverage >10% of active area.
RF continuity: Test with a VOM; resistance must be <0.5 ohms between feedthrough and electrode body.
Insulation integrity: Apply 500VDC with a megohmmeter; minimum 100 MΩ required.
Cycle count: Request plasma cycle logs; >15k cycles correlates with 30% higher defect rates in 2025 fab data.
Coating wear: Measure alumina thickness via eddy current testing; <0.8 mm requires re-coating.

FAQ

Q: Is used upper electrode Part #UE-1356 compatible with Lam P6i?
A: No. Part #UE-1356 is designed for P5i only. Use Part #UE-1422 for P6i (2010+ models).

Q: How to test electrode for arcing risks?
A: Perform a 1-hour 400VDC stress test in a vacuum chamber; arcing >3 events/min invalidates part.

Q: Used vs new electrode lifespan comparison?
A: New electrodes (2026) have 25k-cycle rated lifespan. High-quality used units (5k–10k cycles) retain 60–80% of remaining life.

Q: What’s the ROI for refurbishing vs buying new?
A: Refurbishing a $3,000 used electrode (reprofiling + recoating) costs $1,200–$1,800, vs $14,000 new. Break-even at ~12k cycles.