Various (AMAT, Lam, TEL)
Used Upper Electrode for Semiconductor Etch Chamber
Various (AMAT, Lam, TEL)
Used Upper Electrode for Semiconductor Etch Chamber
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Upper Electrode for Semiconductor Etch Chamber moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Upper Electrode for Semiconductor Etch Chamber cost in 2026?
Pricing for used Used Upper Electrode for Semiconductor Etch Chamber units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (AMAT, Lam, TEL) Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Upper Electrode for Semiconductor Etch Chamber from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Upper Electrode Specifications and Compatible Tools
Key specs: 13.56 MHz RF frequency, 2.0 kW power handling, 200–400 VDC bias, 316L stainless steel body with alumina insulation. Compatible with:
- AMAT Centura 5500 (1998–2005)
- Lam P5i (2001–2009)
- TEL FAS-3000 (2003–2012)
Exclusion: Not compatible with AMAT Reflexion Etch systems (Part #AE-UE-200X due to RF coupling geometry). Verify tool’s RF matching network before installation.
What to Check Before Buying a Used Upper Electrode in 2026
- Surface pitting: Use a profilometer; reject if depth exceeds 50 microns or coverage >10% of active area.
- RF continuity: Test with a VOM; resistance must be <0.5 ohms between feedthrough and electrode body.
- Insulation integrity: Apply 500VDC with a megohmmeter; minimum 100 MΩ required.
- Cycle count: Request plasma cycle logs; >15k cycles correlates with 30% higher defect rates in 2025 fab data.
- Coating wear: Measure alumina thickness via eddy current testing; <0.8 mm requires re-coating.
FAQ
Q: Is used upper electrode Part #UE-1356 compatible with Lam P6i?
A: No. Part #UE-1356 is designed for P5i only. Use Part #UE-1422 for P6i (2010+ models).
Q: How to test electrode for arcing risks?
A: Perform a 1-hour 400VDC stress test in a vacuum chamber; arcing >3 events/min invalidates part.
Q: Used vs new electrode lifespan comparison?
A: New electrodes (2026) have 25k-cycle rated lifespan. High-quality used units (5k–10k cycles) retain 60–80% of remaining life.
Q: What’s the ROI for refurbishing vs buying new?
A: Break-even at ~12k cycles.
Recent Market Listings
Updated Sep 30No recent market activity for Used Upper Electrode for Semiconductor Etch Chamber.
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