
Various (VAT, MDC, HVA)
Used Vacuum Valve — Gate, Angle, Isolation
Market Price
→ Stable$786–$5K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Price Range
$786 — $5K
Based on verified secondary market transactions
Last Sold
$2,100
May 8, 2026
RefurbishedHow much does a used Used Vacuum Valve — Gate, Angle, Isolation cost in 2026?
A used Used Vacuum Valve — Gate, Angle, Isolation from Various (VAT, MDC, HVA) typically sells for $100 – $100 on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various (VAT, MDC, HVA) Vacuum Systems vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Vacuum Valve — Gate, Angle, Isolation from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Used Vacuum Valve Cost in 2026?
Used VAT, MDC, and HVA vacuum valves (gate/isolation) range from $2,480 to $8,820 in 2026, depending on port size (4–10") and actuator type (pneumatic vs solenoid). Refurbished units with new seals and recalibrated actuators add 12–18% to the base price. Compared to new valves (typically $15,000–$25,000), used parts save 60–75%. Caveat: Valves with >500,000 actuation cycles require solenoid coil replacement ($420–$780), unless the original equipment manufacturer (OEM) service contract covers it.
Vacuum Valve Specifications and Compatible Tools
Key specs: operating pressure range (10⁻⁹ to 10⁻³ Torr), flow conductance (12–45 L/s), 24V DC solenoid, and stainless-steel body (316L). Compatible with:
- VAT-3000 Series (2015–2018)
- MDC-VG4500 (2017–2020)
- HVA-Isol8-10 (2016–2019)
Exclusion: Do not install on Applied Materials Centura P5500 (part #AM-VAL-211) without a ¼"-NPT adapter plate. MDC valves lack the required ISO-KF flange threading for direct fit.
What to Check Before Buying a Used Vacuum Valve in 2026
- Leak rate: Test with a helium mass spectrometer; reject if >1×10⁻⁸ mbar·L/s.
- Actuator response time: Measure with a digital oscilloscope; must close within 0.8–1.2 seconds at 24V.
- Valve seat wear: Use a micrometer to check seat flatness; >0.001" deformation invalidates UHV seal.
- Coil resistance: Read with a multimeter; 2.5–3.2kΩ is acceptable. Outliers indicate insulation degradation.
- Age: Valves >10 years old require full rebuild (seals, springs, O-rings) unless original maintenance logs show <200,000 cycles.
FAQ
Q: Used vs refurbished vacuum valve—what’s the difference?
A: Used parts are resold as-is; refurbished units include new seals, recalibrated actuators, and leak testing.
Q: How to test a vacuum valve for microleaks?
A: Use a helium sniffer leak detector with a sensitivity of 1×10⁻¹⁰ mbar·L/s. Apply soapy water to O-ring grooves for visual bubble checks.
Q: Compatible with Lam Research Endura P820?
A: Yes, with a custom VAT-Flange-Ad
Recent Market Listings
Updated May 19$2,100
Refurbished$480
As-is$6,200
Certified$1,500
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Last Sale | $2,100 | Refurbished | May 8, 2026 |
| Last Sale | $480 | As-is | Apr 28, 2026 |
| Last Sale | $6,200 | Certified | Apr 6, 2026 |
| Last Sale | $1,500 | Refurbished | Mar 15, 2026 |
Place a bid · Prices update daily
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